S300 Gas Mass Flow Controller

S300 series mass flow controller (MFC) is a high-performance digital gas mass flow controller developed for photovoltaic, semiconductor, vacuum coating and other industries.
This product adopts the industrial-grade advanced flow sensor chip independently developed by the company, combined with the low-voltage loss gas circuit structure and high-precision digital control circuit and algorithm, to achieve high-precision, high-stability and wide-range ratio control over a wide temperature range.
This product is equipped with optional EtherCAT high-speed communication or Modbus RTU RS485 digital communication, which is convenient for users.
The product is assembled, calibrated and packaged in a 1000-class purification room with a temperature of 24 ± 2 ℃. In order to ensure the product quality, its accuracy, repeatability and other performance indicators must be inspected twice before delivery