The core technology of our gas mass flowmeters is based on advanced thermal diffusion principles. Using precision microelectromechanical systems (MEMS) technology, we integrate a highly sensitive heating element and temperature sensor on a silicon chip. As gas flows through the sensing area, it removes heat, causing the temperature distribution to change. This change is precisely correlated with the gas mass flow rate. We possess fully independent intellectual property rights in the design and manufacturing of MEMS chips, ensuring the high sensitivity, low power consumption, and excellent consistency of the sensor core.
In processes such as silicon material production (polycrystalline silicon and monocrystalline silicon), thin-film solar cell (such as CdTe, CIGS, and Perovskite) coating, and specialty glass coating, the precise measurement of gases such as silane (SiH4), ammonia (NH3), and hydrogen (H2) directly impacts material performance and conversion efficiency. Xinsheng products are a key component in enhancing the competitiveness of the photovoltaic industry.